Van den Bergh opened the semi-final with a brilliant 160 finish and punished early missed doubles from Wade to open up a 5-1 lead.
A high-quality contest then saw the pair hold throw for 12 legs - of which 11 were won in 15 darts or less - before Wade broke in leg 18 and then pinned double ten to cut the gap to 10-9.
Van den Bergh hit back, then broke back with a 76 finish and produced an 11-darter as he pulled out to 13-9, only for Wade to then take four of the next five to level at 14-all.
Van den Bergh posted a 14-darter to move a leg away from victory, but missed a dart at the bull for victory in leg 30 as Wade finished double six to stay in the game.
Team Unicorn duo James Wade & Dimitri Van den Bergh will face off for a place in the BoyleSports Grand Slam of Darts Final later this evening.
James Wade remains on course to reach his third Grand Slam of Darts final after taking a 16-13 win over Damon Heta in a high-quality last eight encounter.
The 2010 and 2016 runner-up made a superb start to win the opening four legs without reply and also led 10-6 at one stage.
Australia's Heta, though, hit back to level the game after 26 legs as he searched for his maiden televised ranking semi-final, only to see the left-hander take three legs without reply to